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Electrostatic comb drive actuators with variable gap: nonlinear dynamics at primary resonance

Published Online: 2022-11-27

Published Print: 2022-12

Authors

Mozhgova, N. V.

Lukin, A. V. https://orcid.org/0000-0003-2016-8612
Popov, I. A.

Indeitsev, D. A.
Funding

Funding for this research was provided by:

Russian Science Foundation (21-71-10009)
License Information

Text and Data Mining valid from 2022-11-27

Version of Record valid from 2022-11-27
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Article History

Received: 7 January 2022

Accepted: 30 October 2022

First Online: 27 November 2022

Declarations

:

: The authors declare that they have no conflict of interest.

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