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The Effect of Focusing on the Lateral Resolution of an Interference Microscope

Crossref DOI link: https://doi.org/10.1007/s11018-014-0408-1

Published Online: 2014-05-01

Published Print: 2014-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Levin, G. G.

Moiseev, N. N.

Ilyushin, Ya. A.

Minaev, V. L.
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Text and Data Mining valid from 2014-04-01