Creation of Calibrated Samples of a Measure with Relief Elements Less Than 100 nm
Crossref DOI link: https://doi.org/10.1007/s11018-016-0872-x
Published Online: 2016-03-02
Published Print: 2016-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Efimenkov, Yu. R.
Zolotarevskii, Yu. M.
Lyaskovskii, V. L.
Min’kov, K. N.
Samoilenko, A. A.
Text and Data Mining valid from 2016-02-01