Measurement of the Thickness Nonuniformity of Nanofilms Using an Electron Probe Method
Crossref DOI link: https://doi.org/10.1007/s11018-016-1051-9
Published Online: 2016-11-15
Published Print: 2016-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Darznek, S. A.
Kuzin, A. Yu.
Mityukhlyaev, V. B.
Stepovich, M. A.
Todua, P. A.
Filippov, M. N.
License valid from 2016-11-01