Crossmark

Production Process Control Subsystem for Manufacture of Integrated Circuits

Crossref DOI link: https://doi.org/10.1007/s11018-017-1227-y

Published Online: 2017-10-02

Published Print: 2017-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Lvovich, I. Ya.

Lvovich, Ya. E.

Preobrazhenskiy, A. P.

Choporov, O. N.

Saleev, D. V.
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License valid from 2017-09-01