Method of Spectral Ellipsometric Evaluation of the Phase Composition of Multilayer Films and Metal-Oxide Structures in the Process of their Growth
Crossref DOI link: https://doi.org/10.1007/s11018-020-01724-0
Published Online: 2020-03-12
Published Print: 2020-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tyurin, D. N.
Kotenev, V. A.
Tsivadze, A. Yu.
Text and Data Mining valid from 2020-02-01
Version of Record valid from 2020-02-01
Article History
Received: 1 July 2019
Accepted: 23 August 2019
First Online: 12 March 2020