Frame Micro-Optoelectromechanical Angular Velocity Transducer with Optical Readout Units Based on the Optical Tunneling Effect
Crossref DOI link: https://doi.org/10.1007/s11018-022-02088-3
Published Online: 2022-11-18
Published Print: 2022-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Busurin, V. I.
Kazaryan, A. V.
Shtek, S. G.
Zheglov, M. A.
Vasetskiy, S. O.
Kyi, P. L.
Text and Data Mining valid from 2022-08-01
Version of Record valid from 2022-08-01
Article History
Received: 29 November 2021
Accepted: 28 March 2022
First Online: 18 November 2022