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Deposition of conductive TiN shells on SiO2 nanoparticles with a fluidized bed ALD reactor

Crossref DOI link: https://doi.org/10.1007/s11051-016-3343-z

Published Online: 2016-02-08

Published Print: 2016-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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