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Systematic parametric investigation on the CVD process of polysiloxane nano- and microstructures

Crossref DOI link: https://doi.org/10.1007/s11051-018-4394-0

Published Online: 2018-11-19

Published Print: 2018-11

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Olveira, Sandro

Stojanovic, Ana

Seeger, Stefan
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Text and Data Mining valid from 2018-11-01
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Article History

Received: 29 March 2018

Accepted: 15 October 2018

First Online: 19 November 2018

Compliance with ethical standards

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: The authors declare that they have no conflict of interest.