Dynamic behavior of an electrostatic MEMS resonator with repulsive actuation
Crossref DOI link: https://doi.org/10.1007/s11071-017-3532-z
Published Online: 2017-04-24
Published Print: 2017-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pallay, Mark http://orcid.org/0000-0003-0163-9845
Daeichin, Meysam
Towfighian, Shahrzad
Funding for this research was provided by:
National Science Foundation (1608692)
Text and Data Mining valid from 2017-04-24
Version of Record valid from 2017-04-24
Article History
Received: 29 August 2016
Accepted: 11 April 2017
First Online: 24 April 2017