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Electrostatic levitation: an elegant method to control MEMS switching operation

Published Online: 2021-05-12

Published Print: 2021-06

Authors

Mousavi, Mohammad

Alzgool, Mohammad

Towfighian, Shahrzad https://orcid.org/0000-0002-5084-7395
Funding

Funding for this research was provided by:

National Science Foundation (1919608)
License Information

Text and Data Mining valid from 2021-05-12

Version of Record valid from 2021-05-12
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Article History

Received: 15 November 2020

Accepted: 26 April 2021

First Online: 12 May 2021

Declarations

:

: The authors declare that they have no conflict of interest.

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