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Nanopositioning control of an electrostatic MEMS actuator: adaptive terminal sliding mode control approach

Published Online: 2021-06-30

Published Print: 2021-07

Authors

Tabatabaee-Nasab, Fahimeh S.

Naserifar, Naser https://orcid.org/0000-0002-4744-9978
License Information

Text and Data Mining valid from 2021-06-30

Version of Record valid from 2021-06-30
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Article History

Received: 20 January 2021

Accepted: 13 June 2021

First Online: 30 June 2021

Declarations

:

: The authors declare that they have no conflict of interest.

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