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Internal resonance in a MEMS levitation force resonator

Crossref DOI link: https://doi.org/10.1007/s11071-022-07721-y

Published Online: 2022-08-13

Published Print: 2022-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Zamanzadeh, Mohammadreza

Meijer, Hil G. E.

Ouakad, Hassen M. https://orcid.org/0000-0001-7262-2130
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Text and Data Mining valid from 2022-08-13

Version of Record valid from 2022-08-13
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Article History

Received: 4 December 2021

Accepted: 7 July 2022

First Online: 13 August 2022

Declarations

:

: The authors declare that they have no conflict of interest