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Multi-channel mass sensing based on multiple internal resonances in three electrostatically coupled resonators

Published Online: 2023-08-28

Published Print: 2023-10

Authors

Zhao, Jian https://orcid.org/0000-0002-2609-8259
Sun, Rongjian

Kacem, Najib

Lyu, Ming

Liu, Pengbo
Funding

Funding for this research was provided by:

Key Technologies Research and Development Program (2022YFB3203600)

NSAF Joint Fund (U1930206)

EUR EIPHI program (ANR 17-EURE-0002)
License Information

Text and Data Mining valid from 2023-08-28

Version of Record valid from 2023-08-28
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Article History

Received: 18 January 2023

Accepted: 6 August 2023

First Online: 28 August 2023

Declarations

:

: The authors declare that they have no conflict of interest.

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