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Precise motion tracking of piezo-actuated stages via a neural network-based data-driven adaptive predictive controller

Published Online: 2023-09-16

Published Print: 2023-10

Authors

Wang, Yifan

Yu, Yewei

Shen, Chuanliang

Zhou, Miaolei
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (51875237)

Jilin Scientific and Technological Development Program (20220508139RC)

Natural Science Foundation Project of Chongqing, Chongqing Science and Technology Commission (CSTB2022NSCQ-MSX0297)
License Information

Text and Data Mining valid from 2023-09-16

Version of Record valid from 2023-09-16
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Article History

Received: 9 November 2022

Accepted: 30 August 2023

First Online: 16 September 2023

Declarations

:

: The authors declare that they have no conflict of interest.

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