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Study on the time-varying dynamic characteristics of porous aerostatic spindle in wafer self-rotational grinding based on bidirectional fluid–structure interaction

Crossref DOI link: https://doi.org/10.1007/s11071-026-12424-9

Published Online: 2026-04-15

Published Print: 2026-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Xu, Jiahui

Zhu, Xianglong

Cai, Yindi

Dai, Lihao

Dong, Zhigang

Kang, Renke

Li, Jiasheng

Zhang, Guohua

Cui, Hailong
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (U22A20198)

National Natural Science Foundation of China (52205544)

National Natural Science Foundation of China (52206123)

National Natural Science Foundation of China (52322510)

MIIT Collaborative Research Project for Key Technologies (2023ZY01077)

National Key Research and Development Program of China (2023YFB3405800)
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Text and Data Mining valid from 2026-04-01

Version of Record valid from 2026-04-01
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Article History

Received: 12 August 2025

Revised: 11 February 2026

Accepted: 26 February 2026

First Online: 15 April 2026

Declarations

:

: The authors declare no competing interests.

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