The effects of DC power on the physical properties and surface topography of sputtered TiN nanostructured thin films
Crossref DOI link: https://doi.org/10.1007/s11082-016-0742-4
Published Online: 2016-09-21
Published Print: 2016-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ghobadi, Nader
Ganji, Mohsen
Luna, Carlos
Ahmadpourian, Azin
Arman, Ali
License valid from 2016-09-21