Operation limitation of CMP in back-thinning process of InSb IRFPAs
Crossref DOI link: https://doi.org/10.1007/s11082-017-1056-x
Published Online: 2017-05-18
Published Print: 2017-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Meng, Qingduan
Zhang, Xiaoling
Lü, Yanqiu
Si, Junjie
Funding for this research was provided by:
the Young Scientists Fund of the National Natural Science Foundation of China (61505048)
the Aero Science Foundation of China (20152442001)
License valid from 2017-05-18