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Innovative microwave discharge plasma technology for high-intensity extreme ultraviolet (EUV) radiation generation

Published Online: 2025-06-24

Authors

Sadeghi, H.

Kiai, S. M. Sadat

Adlparvar, S.

Fazelpour, S.
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Text and Data Mining valid from 2025-06-24

Version of Record valid from 2025-06-24
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Article History

Received: 2 April 2025

Accepted: 3 June 2025

First Online: 24 June 2025

Declarations

:

: The authors declare no competing interests.

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