Study of SiO2 on Ni and Ti Silicide After Different Oxidation Techniques Investigated by XRR, SEM and Ellipsometry
Crossref DOI link: https://doi.org/10.1007/s11085-019-09885-2
Published Online: 2019-02-11
Published Print: 2019-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Rahman, Md. Khalilur
Licitra, Christophe
Nemouchi, Fabrice
Funding for this research was provided by:
CEA-Leti
Text and Data Mining valid from 2019-02-11
Article History
Received: 15 April 2018
First Online: 11 February 2019