Controlled Fluxes of Silicon Nanoparticles to a Substrate in Pulsed Radio-Frequency Argon–Silane Plasmas
Crossref DOI link: https://doi.org/10.1007/s11090-016-9749-7
Published Online: 2016-10-03
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Larriba-Andaluz, Carlos
Girshick, Steven L.
License valid from 2016-10-03
