Investigation of the Expansion of an Oxygen Microwave Remote Plasma for the Growth of Functional Oxide Thin Films
Crossref DOI link: https://doi.org/10.1007/s11090-016-9757-7
Published Online: 2016-10-28
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Al Makdessi, G.
Tabbal, M.
License valid from 2016-10-28