On the Control of Plasma Parameters and Active Species Kinetics in CF4 + O2 + Ar Gas Mixture by CF4/O2 and O2/Ar Mixing Ratios
Crossref DOI link: https://doi.org/10.1007/s11090-017-9820-z
Published Online: 2017-05-13
Published Print: 2017-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Efremov, Alexander
Lee, Junmyung
Kim, Jihun
License valid from 2017-05-13