Performance of a Gyratory Square-Shaped Capacitive Radio Frequency Discharge Plasma Sputtering Source for Materials Processing
Crossref DOI link: https://doi.org/10.1007/s11090-017-9847-1
Published Online: 2017-09-14
Published Print: 2017-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Hossain, Md. Amzad
Ohtsu, Yasunori
Tabaru, Tatsuo
License valid from 2017-09-14
