A Study on the NF3 Plasma Etching Reaction with Cobalt Oxide Grown on Inconel Base Metal Surface
Crossref DOI link: https://doi.org/10.1007/s11090-019-09979-4
Published Online: 2019-03-27
Published Print: 2019-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, Jaeyong
Kim, Kyungmin
Kim, Yong-Soo
Text and Data Mining valid from 2019-03-27
Article History
Received: 22 November 2018
Accepted: 17 March 2019
First Online: 27 March 2019