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Characterization of Gaseous Plasma Sustained in Mixtures of HMDSO and O2 in an Industrial-Scale Reactor

Crossref DOI link: https://doi.org/10.1007/s11090-019-10026-5

Published Online: 2019-09-04

Published Print: 2020-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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