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Plasma-Chemistry of Arsenic Selenide Films: Relationship Between Film Properties and Plasma Power

Published Online: 2019-10-12

Published Print: 2020-01

Authors

Mochalov, Leonid

Logunov, Alexander

Kitnis, Anna

Vorotyntsev, Vladimir
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Text and Data Mining valid from 2019-10-12

Version of Record valid from 2019-10-12
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Article History

Received: 5 March 2019

Accepted: 1 October 2019

First Online: 12 October 2019

Document is current