Parametric Study of Plasma Characteristics and Carbon Nanofibers Growth in PECVD System: Numerical Modeling
Crossref DOI link: https://doi.org/10.1007/s11090-020-10090-2
Published Online: 2020-05-30
Published Print: 2020-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Gupta, Ravi
Sharma, Suresh C.
Text and Data Mining valid from 2020-05-30
Version of Record valid from 2020-05-30
Article History
Received: 16 December 2018
Accepted: 21 May 2020
First Online: 30 May 2020