Etching Characteristic of Graphite and Metal Substrates by Hydrocarbon Plasma in Closed Cavity
Crossref DOI link: https://doi.org/10.1007/s11090-020-10139-2
Published Online: 2020-11-11
Published Print: 2021-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Long, Lin
Zhou, Weixing
Yang, Ling
Zhu, Ximing
Fu, Wen
Text and Data Mining valid from 2020-11-11
Version of Record valid from 2020-11-11
Article History
Received: 3 July 2020
Accepted: 2 November 2020
First Online: 11 November 2020
Compliance with Ethical Standards
:
: The authors declare that they have no conflict of interest.