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High-rate Deposition of Polycrystalline Diamond Film Using Time-series Exposure of Modulated/Non-modulated Induction Thermal Plasmas at Different Flow Rates of Carbon Source Gas

Crossref DOI link: https://doi.org/10.1007/s11090-021-10156-9

Published Online: 2021-02-27

Published Print: 2021-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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