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Numerical Study of SF6/O2 Plasma Discharge for Etching Applications

Crossref DOI link: https://doi.org/10.1007/s11090-021-10170-x

Published Online: 2021-03-27

Published Print: 2021-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Gul, Banat

Gul, Almas

Rehman, Aman-ur

Ahmad, Iftikhar
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Text and Data Mining valid from 2021-03-27

Version of Record valid from 2021-03-27
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Article History

Received: 12 October 2020

Accepted: 14 March 2021

First Online: 27 March 2021