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Quantitative Analysis of Mass Spectrometric Signals for the Estimation of Fluorine Radical Densities in CF4 and CF4/O2 Plasmas

Crossref DOI link: https://doi.org/10.1007/s11090-022-10259-x

Published Online: 2022-05-25

Published Print: 2022-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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