Electron Density and Electron Temperature Control with a Magnetic Field and a Grid in Inductively Coupled Argon Plasma
Crossref DOI link: https://doi.org/10.1007/s11090-022-10295-7
Published Online: 2022-10-28
Published Print: 2023-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
He, Yun-peng
Jin, Wei
Wang, Yi-bo
Lv, Shao-bo
Wang, Rui-sheng
Liu, Jun-qi
Liu, Hai-cheng
Text and Data Mining valid from 2022-10-28
Version of Record valid from 2022-10-28
Article History
Received: 31 May 2022
Accepted: 19 October 2022
First Online: 28 October 2022