The Effect of the Process Parameters on the Growth Rate and Composition of the Anti Scratch Films Deposited from TEOS by AP-PECVD on Polycarbonate
Crossref DOI link: https://doi.org/10.1007/s11090-023-10331-0
Published Online: 2023-04-18
Published Print: 2023-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bil, Anastasia S. http://orcid.org/0000-0002-7946-4136
Alexandrov, Sergey E. http://orcid.org/0000-0003-0129-0479
Text and Data Mining valid from 2023-04-18
Version of Record valid from 2023-04-18
Article History
Received: 16 January 2023
Accepted: 3 April 2023
First Online: 18 April 2023