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Investigation of Capacitively Coupled Radio-Frequency Argon Plasma: Integration of in Situ Optical Diagnostics with Data-Driven and Theoretical Modeling

Crossref DOI link: https://doi.org/10.1007/s11090-025-10563-2

Published Online: 2025-04-12

Published Print: 2025-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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