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Thermodynamic modeling of SiBCN film deposition from the gas phase in the Si—B—N—C—H system

Crossref DOI link: https://doi.org/10.1007/s11172-021-3083-9

Published Online: 2021-02-25

Published Print: 2021-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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