Chemical vapor deposition of iron-containing films during the decomposition of trimethylamine borane-ferrocene (or iron pentacarbonyl) mixtures: a thermodynamic modeling
Crossref DOI link: https://doi.org/10.1007/s11172-021-3238-8
Published Online: 2021-09-01
Published Print: 2021-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shestakov, V. A.
Kosinova, M. L.
Text and Data Mining valid from 2021-08-01
Version of Record valid from 2021-08-01
Article History
Received: 10 November 2020
Revised: 18 December 2020
Accepted: 20 February 2021
First Online: 1 September 2021