Properties of Molybdenum Films Produced by High-Power Impulse Magnetron Sputtering
Crossref DOI link: https://doi.org/10.1007/s11182-017-1218-0
Published Online: 2017-11-30
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zakharov, A. N.
Solov’ev, A. A.
Oskomov, K. V.
Oskirko, V. O.
Semenov, V. A.
Syrtanov, M. S.
Bordulev, Yu. S.
License valid from 2017-11-30