Plasma Chemical Synthesis of Amorphous Hydrocarbon Films Alloyed by Silicon, Oxygen and Nitrogen
Crossref DOI link: https://doi.org/10.1007/s11182-019-01835-4
Published Online: 2019-11-18
Published Print: 2019-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Grenadyorov, A. S.
Oskomov, K. V.
Solovyev, A. A.
Ivanova, N. M.
Sypchenko, V. S.
Text and Data Mining valid from 2019-11-01
Version of Record valid from 2019-11-01
Article History
Received: 14 June 2019
First Online: 18 November 2019