Axial Distribution of the Ion Mass-to-Charge State in a Magnetron Discharge Plasma
Crossref DOI link: https://doi.org/10.1007/s11182-020-01934-7
Published Online: 2020-03-13
Published Print: 2020-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shandrikov, M. V.
Artamonov, I. D.
Vizir, A. V.
Bugaev, A. S.
Oks, E. M.
Text and Data Mining valid from 2020-03-01
Version of Record valid from 2020-03-01
Article History
Received: 13 September 2019
First Online: 13 March 2020