Crossmark

Special Aspects of High-Intensity Low-Energy Ion Implantation

Crossref DOI link: https://doi.org/10.1007/s11182-021-02238-0

Published Online: 2021-02-20

Published Print: 2021-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Ryabchikov, A. I.

Ivanova, A. I.

Korneva, O. S.

Sivin, D. O.
License Information

Text and Data Mining valid from 2021-02-01

Version of Record valid from 2021-02-01
More Information

Article History

Received: 15 July 2020

First Online: 20 February 2021