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Modification of the Material Surface by Boron Ions Based on Vacuum Arc Discharge Systems and a Planar Magnetron

Published Online: 2021-02-20

Published Print: 2021-02

Authors

Bugaev, A. S.

Vizir, A. V.

Gushenets, V. I.

Nikolaev, A. G.

Nikonenko, A. V.

Oks, E. M.

Savkin, K. P.

Frolova, V. P.

Shandrikov, M. V.

Yushkov, G. Y.
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Text and Data Mining valid from 2021-02-01

Version of Record valid from 2021-02-01
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Article History

Received: 15 July 2020

First Online: 20 February 2021

Document is current