Principal Physics of Oblique Sputtering of Calcium Phosphate Coatings Using RF-Magnetron Discharge Plasma
Crossref DOI link: https://doi.org/10.1007/s11182-021-02247-z
Published Online: 2021-03-17
Published Print: 2021-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Prosolov, K. A.
Belyavskaya, O. A.
Lastovka, V. V.
Chaikina, M. V.
Sharkeev, Yu. P.
Text and Data Mining valid from 2021-03-01
Version of Record valid from 2021-03-01
Article History
Received: 12 February 2020
First Online: 17 March 2021