Energy Flux at the Substrate During Dual Magnetron Sputtering of TiAlN Coating
Crossref DOI link: https://doi.org/10.1007/s11182-023-02837-z
Published Online: 2023-03-15
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Grenadyorov, A. S.
Zakharov, A. N.
Oskirko, V. O.
Sidelev, D. V.
Oskomov, K. V.
Solovyev, A. A.
Text and Data Mining valid from 2023-03-15
Version of Record valid from 2023-03-15
Article History
Received: 12 October 2022
Accepted: 20 October 2022
First Online: 15 March 2023