Conducting Probe Atomic Force Microscope as a Relevant Tool for Studying Some Phenomena in MEMS Switches
Crossref DOI link: https://doi.org/10.1007/s11220-015-0124-1
Published Online: 2015-11-23
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Peschot, A.
Vincent, M.
Poulain, C.
Mariolle, D.
Houzé, F.
Delamare, J.
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