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Effect of Environmental Conditions on Quality Factors of MEMS Cantilever Beam Resonator in Gas Rarefaction

Published Online: 2021-01-17

Published Print: 2021-12

Authors

Phan, Minh Truong

Trinh, Xuan Thang

Le, Quoc Cuong

Ngo, Vo Ke Thanh

Nguyen, Chi Cuong https://orcid.org/0000-0002-3566-7783
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Text and Data Mining valid from 2021-01-17

Version of Record valid from 2021-01-17
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Article History

Received: 2 November 2020

Revised: 7 December 2020

Accepted: 29 December 2020

First Online: 17 January 2021

Document is current