Fractional In Situ Pad Conditioning in Chemical Mechanical Planarization
Crossref DOI link: https://doi.org/10.1007/s11249-016-0803-7
Published Online: 2016-12-24
Published Print: 2017-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Han, Ruochen
Sampurno, Yasa
Philipossian, Ara
License valid from 2016-12-24