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Core–Shell Structured Silica Nanoparticles as Abrasive for Tungsten Chemical Mechanical Planarization

Published Online: 2024-11-26

Published Print: 2025-03

Authors

Pan, Deng

Ren, Gaoyuan

Zhang, Jingwei

Liu, Xiangyu

Wang, Shudong
Funding

Funding for this research was provided by:

DICP Foundation (I202140, I202140, I202140, I202140, I202140)
License Information

Text and Data Mining valid from 2024-11-26

Version of Record valid from 2024-11-26
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Article History

Received: 23 August 2024

Accepted: 23 October 2024

First Online: 26 November 2024

Declarations

:

: The authors declare no competing interests.

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