Self-aligned offset gate poly-Si TFTs using photoresist trimming technology
Crossref DOI link: https://doi.org/10.1007/s11432-014-5230-5
Published Online: 2014-12-15
Published Print: 2015-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, LongYan
Sun, Lei
Han, DeDong
Wang, Yi
Chan, ManSun
Zhang, ShengDong
Text and Data Mining valid from 2014-12-15