High-quality and large-grain epi-like Si film by NiSi2-seed initiated lateral epitaxial crystallization (SILEC)
Crossref DOI link: https://doi.org/10.1007/s11432-019-2700-1
Published Online: 2020-06-28
Published Print: 2020-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yang, Yuancheng
Zhang, Baotong
Dong, Xiaoqiao
Li, Xiaokang
Sun, Shuang
Cai, Qifeng
Bi, Ran
Xu, Xiaoyan
Li, Ming
Huang, Ru
Text and Data Mining valid from 2020-06-28
Version of Record valid from 2020-06-28
Article History
Received: 9 September 2019
Revised: 27 October 2019
Accepted: 9 November 2019
First Online: 28 June 2020